Mentor MEMS Design Flow

Tanner MEMS design flow delivers 3D MEMS design and fabrication support in one unified environment, and makes it easy to integrate MEMS devices with analog/mixed-signal processing circuitry on the same IC. Foundry-proven, it enhances the manufacturability of MEMS devices via mechanical, thermal, acoustic, electrical, electrostatic, magnetic and fluid analyses.

  • Create a MEMS 3D model from layout
  • Highly programmable layout editor with MEMS-friendly capabilities, such as curved polygons
  • Design rule checking for MEMS manufacturability
  • System-level simulation of IC design and MEMS devices
  • Complete layer & design geometry visualization
  • Automatically generate behavioral models of your MEMS devices
  • Import DXF with boundary reconstruction, export DXF
  • Available for Windows or Linux

FEATURES

Advanced 3D analysis tools

  • Supports mechanical, thermal, acoustic, electrical, electrostatic, magnetic and fluid analyses.

Complex polygon Boolean operations

  • Reduces errors and increases productivity.

Automatic layout generation with parameterized cells

  • Cells can be compiled for speed and/or distribution, programmed in C++ or Tcl. Supports external interfaces.

Advanced mask layout and verification flow

  • Support for a wide variety of MEMS foundry-proven process support available.