Mentor MEMS Design Flow
Tanner MEMS design flow delivers 3D MEMS design and fabrication support in one unified environment, and makes it easy to integrate MEMS devices with analog/mixed-signal processing circuitry on the same IC. Foundry-proven, it enhances the manufacturability of MEMS devices via mechanical, thermal, acoustic, electrical, electrostatic, magnetic and fluid analyses.
- Create a MEMS 3D model from layout
- Highly programmable layout editor with MEMS-friendly capabilities, such as curved polygons
- Design rule checking for MEMS manufacturability
- System-level simulation of IC design and MEMS devices
- Complete layer & design geometry visualization
- Automatically generate behavioral models of your MEMS devices
- Import DXF with boundary reconstruction, export DXF
- Available for Windows or Linux
FEATURES
Advanced 3D analysis tools
- Supports mechanical, thermal, acoustic, electrical, electrostatic, magnetic and fluid analyses.
Complex polygon Boolean operations
- Reduces errors and increases productivity.
Automatic layout generation with parameterized cells
- Cells can be compiled for speed and/or distribution, programmed in C++ or Tcl. Supports external interfaces.
Advanced mask layout and verification flow
- Support for a wide variety of MEMS foundry-proven process support available.
